Equipment name:

Horizontal Low Pressure Oxidation/Annealing Equipment

Equipment Model:

DOA-420/DOA-420L/DOA-420MAX

Equipment Application:

Low Pressure oxidation, annealing.

Features:

1、High throughput.

2、Patented technology, compatible or upgradeable with boron diffusion process.

3、Unique double-layer-nested furnace door structure.

4、High-speed and stable integral module boat pushing mechanism.

Parameters: