Equipment name:

Horizontal Low Pressure Boron Diffusion Equipment

Equipment Model:

DOA-420/DOA-420L/DOA-420MAX

Equipment Application:

Low pressure, high temperature boron diffusion & doping.

Features: 

1、Matured BBr3 liquid source & BCL3 gas source control and delivery technology.

2、Patented technology.

3、Unique double-layer-nested furnace door structure.

4、High-speed and stable integral module boat pushing mechanism.

5、Intelligent automatic control.

6、MES software with independent intellectual property rights.

7、Matching S.C smart production management system.

Parameters: