Equipment Name:

Horizontal PECVD

Equipment Model:

PD-520/PD-520L/PD-520MAX

Equipment Application:

Depositionof SiN, SiON ,etc.

Features:

1、Reliable electrode contact, effectively reduce dust as well as the frequency of high frequency alarms.

2、Simple and reliable automatic boat loading/unloading unit improves themaintenance space and convenience of the equipment.

3、Single-sided installation and maintenance of moving parts,reducing the footprint of the back-to-back equipment without affecting the maintenance of the equipment.

4、High-speed and stable integral module boat pushing mechanism.

5、Auxiliary heating patent technology.

6、Rapid coating technology.

7、MES software & CCC system with independent intellectual property rights.

Parameters: