Equipment name:

Horizontal Low Pressure Phosphorus Diffusion Equipment

Equipment Model:

DOA-400/DOA-400L

Equipment Application:

Low pressure phosphorus diffusion & doping.

Features: 

1、Technical solutions for high sheet resistance.

2、Unique double-layer-nested furnace door structure,free from metaphosphoric acid problem at the urnace mouth effectively.

3、Unique temperature zone setting which guarantees the uniformity of sheet resistance at the furnace mouth and end effectively.

4、High-speed and stable integral module boat pushing mechanism.

5、Intelligent automatic control.

6、MES software with independent intellectual property rights.

7、Matching S.C smart production management system.

Parameters: