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HJT Inline PECVD

Intrinsic film deposition & a-si film doping.
Horizontal LPCVD

Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.
Horizontal PECVD (Poly-Si)

Deposition of tunnel oxide layer, i-Poly and D-poly for TOPCon solar cells.
Horizontal PECVD (Two-In-One)

AlOx+SiN deposition.
Horizontal PECVD

Depositionof SiN, SiON ,etc.
Horizontal PEALD (A&P)

AlO+SiN Thin-film Deposition.
Horizontal Low Pressure Phosphorus Diffusion Equipment

Low pressure phosphorus diffusion & doping.
Horizontal Low Pressure Boron Diffusion Equipment

Low pressure, high temperature boron diffusion & doping.
Horizontal Low Pressure Oxidation/Annealing Equipment

Low Pressure oxidation, annealing.
HJT Texturing Equipment

Used for texturing and cleaning of high efficiency Heterojunction solar cells.
Batch-type Alkaline Polishing Equipment

This equipment is used for polishing, etching and cleaning treatment of diffused wafers and also compatible for texturing and cleaning treatment of bifacial solar cells.
Batch-type RCA Cleaning Equipment

Used for wrap around removal & cleaning of the diffused silicon wafers.

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HJT Inline PECVD

Horizontal LPCVD

Horizontal PECVD (Poly-Si)

Horizontal PECVD (Two-In-One)

Horizontal PECVD

Horizontal PEALD (A&P)

Horizontal Low Pressure Phosphorus Diffusion Equipment

Horizontal Low Pressure Boron Diffusion Equipment

Horizontal Low Pressure Oxidation/Annealing Equipment

HJT Texturing Equipment

Batch-type Alkaline Polishing Equipment

Batch-type RCA Cleaning Equipment